Forschungsinstitute
An ULVAC Group think tank designed to meet customers' up-to-the-minute process needs with a multilateral approach to problem-solving that incorporates equipment, processes and materials.
| Institute for Semiconductor Technologies |  |
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| Institute for Semiconductor Technologies (IST) of ULVAC, Inc. takes it as its biggest objective to provide the latest technology that meets the tough needs of customers by developing materials and processes in the ever-changing semiconductor manufacturing industry. Furthermore, IST' "New Technology of the 21st Century" is the prime mover that will enable ULVAC to be the best partner for customers forever. | ||
| Chiba Institute for Super Materials | Tsukuba Institute for Super Materials | |
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| Develops thin-film formation processes for flat panel display components (such as LCDs, PDPs and OLEDs) or storage technology (such as DVD-RAMs and DVD-RWs). |
Develops a wide range of 'seed technologies' that form the foundation of future work. Recent projects include development work in the following areas: |
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| Technology Development Department (at Headquarters) | ||
| Develops vacuum devices (such as vacuum pumps) and ultra-high vacuum devices. Other work includes developing computer-integrated manufacturing (CIM) and mechatronics technologies such as non-contact floating magnetic wafer transfer robots, and vacuum robots used in next-generation super-clean semiconductor manufacturing processes. | ||