EX / EBX Evaporation systems
EX/EBX Evaporation Systems
The EX/EBX Series are batch-type high-vacuum evaporation systems created using the benefits of ULVAC's many years of evaporation system technology and experience. ULVAC has released many systems for opto-device soldering and electrode multilayer deposition of compound semiconductors. The EX/EBX Series includes models for a variety of R&D or production applications.
Features
- EB evaporation sources/resistor heating evaporation sources can be loaded.
- Vertical incidence for lift-off processes
- Supports through-the-wall configuration.
- Completely automatic operation