SME Series Sputtering Systems
SH and SIH Series Sputtering Systems
Isputter Sputtering System for R und D
MPS Series Ultra-High Vacuum Helicon Sputter Systems
MPS-4000-HC6 Sputtering System for MRAM/TMR Research
R und D Dielectric Sputtering System
Compound Organic/Inorganic Deposition Systems
SME Series Sputtering Systems
The SME Series is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors. The series lets you create a highly cost-effective line tailored to your application.
Features
- Can be used to manufacture gate electrodes, capacitors, resistors and a wide range of components.
- Highly-reproducible, high-quality deposition
- Choice of system configurations, with up to 3 sputter chambers
- Easy maintenance reduces down time.
- Outstanding film stress control and particle reduction