EW evaporation web coating systems
SPW sputter web coating systems
Compound Organic/Inorganic Deposition Systems

EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.
The substrate transfer system uses the latest winding control technology, ensuring stable transfer for every substrate material and size.
Induction heating, resistance heating, and EB heating evaporation sources are available. The optimum source for the application can be selected.
A wide range of pre- and post-process mechanisms are available to enable optimum process conditions.
Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, other)
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EWA Series
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EWC/E Series
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EWJ Series
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Application
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Packaging materials,
gold/silver thread |
Capacitors
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Transparent barriers, tapes, other
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Evaporation source
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High-frequency induction heating
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Resistance heating
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EB heating
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Substrate material
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PET, OPP, PVC, CPP and other macromolecular films, paper, metal foil, other
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Substrate size (width)
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3,000 mm max.
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900 mm max.
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2,100 mm max.
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Winding rate
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1,000 m/minute max.
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Film thickness distribution
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±5% (varies according to deposition conditions)
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Film thickness monitors
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Transmission monitor, eddy current monitor, contact-type resistance value monitor, other
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Pre-/post-process mechanisms
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Substrate heating, AC/DC bombardment, RF bombardment, other
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Main evacuation systems
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Oil diffusion pump, oil diffusion ejector pump
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