ECH in-line evaporation systems

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ECH In-line Evaporation Systems

The ECH Series are in-line evaporation systems for deposition of MgO films. They contain pierce type electronic-gun EB evaporation sources, and enable stable deposition methods.

Features

  • Enable uniform film thickness and film quality on large glass substrates.
  • High throughput
  • Stable movement over long periods
  • Reduced maintenance and startup time
  • Models with new vacuum return method are available

Applications

  • Protective films for PDPs

Specifications

  ECH - 105 ECH - 135 ECH - 150
Supported substrate size
Up to 42 inches
Up to 60 inches
Up to 70 inches
Number of substrates
1 (1,250 x 1,110 mm)
2 (750 x 950 mm)
2 (750 x 950 mm)
Tact time
4 to 6 minutes
2.5 to 6 minutes
2.5 to 6 minutes
Substrate heating
200°C
Continuous operation time
1 week (about 144 hours)