IPB series Ion Plating systems
IPB Series Ion Plating Systems
The IPB Series is a lineup of standard models ranging in size from compact to large. The series contains a batch type, an inline type (multi-chamber) and a continuous deposition type for long substrates. Computer control makes automatic operation easy even for complex deposition processes.
Features
- HCD evaporation source with high ionization rate
- High-speed deposition, high-volume processing
- High ionization rate enables films with minute, smooth surfaces.
- Heater for heating/degassing makes it easy to degas chamber and substrate.
- New process developed by ULVAC enables higher level of adhesion.
Applications
- Surface processing of drills, cutters and other cutting tools
- Improving abrasion resistance and release characteristic of die surfaces
- Ornamentation on products such as eyewear frames
- Corrosion resistance and ornamentation for automotive parts
- Improving desorption/adsorption characteristics of vacuum parts
Specifications
| IPB-300 | IPB-450 | ||
| Processing zone (diameter x length (mm)) | 300 x 450 | 450 x 675 | |
| Processing weight (kg) | 100 | 200 | |
| Deposition speed (TiN, static (µm/min) | 0.5 | ||
| Reaction gases | N2 C2H2 O2 | ||
| Heater | Standard | ||
| Jigs | 3-shaft rotating jig | Standard | |
| 6-shaft rotating jig | Standard | ||
| Other | Optional | ||
| Utilities | Installation space (W x L x H; m) |
3.2 x 4.8 x 2.0 | 3.5 x 5.6 x 2.6 |
| Power (kVA) | 100 | 345W x 440L (W x L:2levels) |
|
| Cooling water (m3/hr) | 2.8 | 4.2 | |
| Ar gas (SCCM) | 30 | 50 | |
| Reaction gas (N2; SCCM) |
300 | 500 | |