Sputter Systems
Sputtering Systems
The SME Series is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors. The series lets you create a highly cost-effective line tailored to your application.
Features
- Can be used to manufacture gate electrodes, capacitors, resistors and a wide range of components.
- Highly-reproducible, high-quality deposition
- Choice of system configurations, with up to 3 sputter chambers
- Easy maintenance reduces down time
- Outstanding film stress control and particle reductionon