Aluminum Interconnects
Entron System for Aluminum Metallization
Process capability that spans over five technology generations, ULVAC has proven Aluminum metallization on the versatile Entron System.
Features
- 200mm or 300mm wafer processing
- Space Saving Tandem (6 chambers) Platform
- Single Wafer Load/Unload Chambers with Degas and Cool Capabilities
- PVD and CVD compatible configuration available
