SRH Series
SRH Series
The SRH Series are single-wafer sputtering systems for mounting/UBM. An unique transfer mechanism and process chamber structure enables the extremely high cost performance demanded by deposition systems for mounting/UBM. SRH-730 (SRH-820) lets you mount up to 6 (7) process chambers, for a process chamber layout to meet precise needs.
Features
- SRH-730 (300/200 mm wafers) can be used for either 300 or 200 mm wafers alone or different size load ports can be attached to the wafer transfer unit to enable continuous processing of different wafer sizes.
- SRH-820 (200/150/100 mm wafers) can process different wafer sizes by changing the wafer transfer unit (takes about 5 minutes).
- SRH-420MC(200/150/100 mm wafers) is possible to process ultra thin wafers.
- All series models have been designed and manufactured in conformance with the SEMI safety standard.
- Since many process chambers can be mounted, configurations can be designed for needs such as low cost, full production with longer maintenance cycles, or multiple-product lines with different target processes.
- Since each process chamber is independent, conditions can be set for each chamber individually.
Applications
- UBM/barrier layers, adhering layers, plating seed layers, surface refining, other
- Back-surface electrodes/barrier layers, adhering layers
Specifications
|
SRH-730
|
SRH-820
|
SRH-420MC
|
|
| Supported substrate size |
f300/200mm
|
f200/150/100mm
|
f200/150/100mm
|
| Number of process module |
Up to 6
|
Up to 7
|
Up to 5
|
| Supported processes |
Wafer heating
|
Wafer heating
|
Wafer heating
|
|
Etching
|
Etching
|
Etching
|
|
|
Deposition
|
Deposition
|
Deposition
|
|
| Cassette used |
FOUP or OPEN
|
OPEN
|
OPEN
|
| Process chamber evacuation system |
DRY.P+TURBO.P
|
DRY.P+TURBO.P
|
DRY.P+TURBO.P
|
| Transfer chamber |
CRYO.P
|
CRYO.P
|
CRYO.P
|
| Sputter targets |
f420 x 12t
|
f300 x 12t
|
f300 x 12t
|
| Installation surface area |
W4500 x D6500mm
|
W4200 x D4000
|
W380 x D3043
|
| Control system |
Fully automatic
PC + sequencer Logging function included |
Fully automatic
PC + sequencer Logging function included |
Fully automatic
sequencer Logging function included |