CCV-1400
SDP-s series In-line Sputtering Systems
SMD Series Single-substrate Sputtering Systems
CMD Series Single-substrate PECVD Systems
Charging System with Rapid Charger for Electric Vehicles (EVs)
CVD Systems for Solar Cells
CCV Systems
The CCV Series are in-line PECVD systems for deposition of amorphous silicon and micro-crystalline silicon films. The system is designed for high throughput and low cost and has a large install base for solar cell production.
Features
- Available for large substrate sizes.
- High throughput by processing two substrates at once.
- Low system and operation cost.
Applications
- a-Si Solar Cells
Specifications
| CCV-1400 | ||
| Substrate size | 1100X 1400 X 5 mm | |
| Deposition Rate | 13 nm/min | |
| Productivity | 40 substrates / hour | |