VEP compound deposition systems
Compound Organic/Inorganic Deposition Systems
VEP Compound Deposition Systems
VEP Series models are systems for deposition of various organic and inorganic materials by methods including evaporation, sputtering, plasma metallization and evaporation metallization. Process chambers can be freely selected to match the application.
Features
- System modules can be combined to create configurations ranging from single-function vacuum process chambers to multiple deposition chambers.
- Enables a continuous series of vacuum processes.
- Organic material applications enable selection of evaporation sources according to vapor pressure.
- Can be upgraded in future by connecting additional process chambers as desired.
Applications
- Molecular devices
- Biosensors
- Organic EL/semiconductors
- Layer insulation films
- Organic functional thin films
Specifications
| Series name |
VEP-1000 Series
|
| Chamber material |
Stainless steel
|
| Chamber size |
350 x 650 mm (diameter x height)
|
| Substrate size |
2-inch diameter or 2 inches square
|
| Evacuation system |
Oil diffusion pump or turbomolecular pump
|
| Final pressure |
10-4Pa max.
|
| Substrate heating |
Maximum temperature : 250ºC
|
| Substrate transfer |
Pneumatic horizontal transfer system
|