
Sputter ion pumps are one type of pumps used to create ultra-high vacuums, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high and extremely high vacuums on the order of 10-10 Pa. They are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuums, and to optimize magnetic fields.
| Pumping speed to 1 x 10-7 Pa (operating pumping speed) |
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| Ultimate pressure | 10-10Pa order | ||||
| Operating pressure | <8.0 x 10-3Pa(recommended value) (Maximum operation pressure : 1.3 x 10-2Pa) *(Using GST-03L controller) |
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| Inner volume | 0.014m3 approx. | ||||
| Number of pump elements | CX2 cells (x 4), AX2 cells (x 4) | ||||
| Connection flange model | UFC203 | ||||
| Applied voltage | DC+7.5kV | ||||
| Standard bake-out temperature | 250°C(heat resistance temperature : 350°C) | ||||
| Weight | 124kg (with heater, cover) | ||||
| External dimensions (W x D x H) | 296 x 544 x 376mm | ||||
| Power required by heater unit | Single-phase 200 V, 800 W approx. |