QULEE with YTP
Quadrupole mass spectrometer with differential pumping kit Qulee with YTP
A Variation of Qulee, adding new features in response to customer needs. By adding the differential pumping unit, this product enables various measurement/analysis from process management to residual gas analysis.
Features
- Enables various gas analysis by one unit, with the differential pumping unit.
- Selectable max measurable pressure (by choosing orifice)
- Software "Qulee QCS" included. (compatible with Windows 2000, XP, and Vista)
Applications
- Gas monitoring of PVD system during processing.
- Residual gas analysis in PVD system
- Residual gas analysis for high vacuum pumping equipment, etc.
- Various types of gas analysis for research and development
Specifications
| Item | Qulee with YTP | |
| Qulee Main body |
Select from BGM-101 / 102 / 201 / 202 |
|
| Max Sampling pressure | Select from 100000Pa (Atmospheric pressure) / 500Pa / 100Pa / 10Pa / 1Pa (by orifice size) |
|
| Operating Temperature |
10 - 40ºC |
|
| Standard Software | Qulee QCS (Windows2000/XP/Vista) | |