G-Tran Pirani Gauges

g tranpirani

G-Tran Series Pirani Gauge Measuring Units

The G-Tran Series contains two Pirani gauge measuring units: a sensor unit (SP1) and box unit (BPR2). The sensor unit has an integrated gauge head and circuit (with a replaceable gauge head). The box unit has a separate gauge head and circuit, enabling gauge head baking. It also comes with an RS-485 interface.

Features

  • Output of analog signals and set points (2 points)
  • Pseudo-logarithmic output (box unit only)
  • RS-485 communication (supports multi-drop; box unit only)
  • Gauge head can be easily replaced, and is interchangeable with previous-model gauge heads.
  • Enables gauge head baking (box unit only).

Applications

  • Process control for equipment for manufacturing semiconductors or other electronic parts
  • Process control for furnaces and other industrial equipment
  • Process control for manufacturing equipment with several process chambers (such as inline or single-wafer systems)

Specifications

Name Sensor unit Box unit
Model SP1 BPR2
Compatible gauge heads WP - 01, 02, 03, 16 WP - 01, 02, 03, 16,
WPB - 10
Measured pressure range (Pa) 4.0 x 10-1 to 3.0 x 10+3
Measurement precision ±15% (51 to 760Pa)
±30% (10 to 1000Pa)
±50% (0.4 to 3000Pa)
Operating temperature range (ºC) 10 to 40
Recorder output Non-linear output : 0 to 5 VDC (MAX.10VDC)
- Pseudo-logarithmic output:
0 to 10 VDC
(1 V linear output for each digit)
Control output signal (open collector) ERROR signal, set points 1/2
LED display Power, error, set points 1/2
Communication type - RS-485
Power supply DC24V±2V,
90mA(MAX)		 DC24V±2V, 50mA(MAX)
I/O connector D-sub, 15 sockets, M2.6 screw
Measuring unit weight (g)
excluding sensor head		 190 270
Options Gauge head