Qulee - HGM
Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor
Qulee HGM
ULVAC's new residual gas analyzer QULEE series, with revolutionary simplicity and usability, now offers a high-end model "QULEE HGM".
Achieving highest sensitivity among all models at 2.5 x 10-6 A/Pa, QULEE HGM can meet the needs in various R&D and other vacuum system process monitoring.
Features
- Achieved highest senstivity 2.5 x 10-6 A/Pa(Ie = 1mA)
- Max. 250ºC High temperature baking while connecting the sensor.
- Display integrated design
- Simple operation-"One Click" function
- Total pressure measurement
- Qulee QCS Software is included
- CE certified
Applications
- Various types of gas analysis for research and development.
- Residual gas analysis for ultra high vacuum pumping equipment, etc.
- Residual gas analysis in PVD system and vacuum deposition.
- R&D for Photovoltaic field.
Specifications
| Item | Qulee HGM | |
| Model no. |
HGM-202 |
|
| Mass Filter Type | Quadrupole | |
| Mass Range |
1-200 amu |
|
| Resolution | M/ΔM=1M(10% P.H.) | |
| Sensitivity | 2.5 x 10-6A/Pa | 4A/Pa |
| Minimum Detectable Partial Pressure | 10-9Pa Level | 10-13Pa Level |
| Detector Type | Faraday Cup | EM Tube/Faraday Cup |
| Maximum Operating Pressure | 1x10-2Pa | |
| Toatal Puresure Function | capable | |
| One Click function | capable/He/H2O/N2/O2/Any Gas |
|
| One Click Leak Test function | capable | |
| Power Input | DC24V | |
| Maximum Sensor Operating Temperature | 250ºC | |
| Maximum Bakeout Temperature (electronics removed) |
300ºC | |
| Operating Temperature | 10 - 40ºC | |
| Standard Software | Qulee QCS (Windows 2000/XP/Vista) | |
| CE MARKING | Compliance | |