Ulvac Solutions Driven by Research and Development

Leading to Next Generation Technologies

Research and development initiatives are carried out by ULVAC's dedicated R&D orgnizations, including the Institute for Semiconductor Technologies, the Chiba Institute for Super Materials and the Research & Development Division, as well as a myriad of R&D personnel within each operating division. We have actively sought patents both in Japan and overseas for our leading-edge technologies. Our leading patented technologies cover a broad range of areas, including ultra-high vacuum-related products, plasma cleaning equipment, deposition systems, organic thin-film deposition techniques and evaporation sources for organic materials. We are also conducting state-of-the-art development initiatives in the areas of next-generation semiconductor manufacturing processes, storage, nanotechnology, energy, the environment, CIM and mechatronics.

 

 

We supply ultra-high vacuum pumps, ultra-high vacuum components, ultra-high vacuum pumping systems, MBE systems, MOCVD systems, ultra-high vacuum helicon sputtering systems and graphite nanofiber growth systems. Our ultra-high vacuum equipment is used in research and development initiatives related to space development, particle accelerators and nanotechnology as well as testing, measurement and analysis in a wide number of research and development areas including diverse fields of medicine.

 

 

We offer scanning X-ray photoelectron spectrometer and Auger electron spectrometers.  Our scanning X-ray photoelectron spectrometer are used in material control  (hard disk and wafer surfaces) and research and development initiatives.