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Home » Products » Vacuum Products » Residual Gas Analyzers » Qulee - HGM

Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor
Qulee HGM

ULVAC's new residual gas analyzer QULEE series, with revolutionary simplicity and usability, now offers a high-end model "QULEE HGM".

Achieving highest sensitivity among all models at 2.5 x 10-6 A/Pa, QULEE HGM can meet the needs in various R&D and other vacuum system process monitoring.

Features

- Achieved highest senstivity 2.5 x 10-6 A/Pa（Ie = 1mA）

- Max. 250ºC High temperature baking while connecting the sensor.

- Display integrated design

- Simple operation-"One Click" function

- Total pressure measurement

- Qulee QCS Software is included

- CE certified

 

Applications

- Various types of gas analysis for research and development.

- Residual gas analysis for ultra high vacuum pumping equipment, etc.

- Residual gas analysis in PVD system and vacuum deposition.

- R&D for Photovoltaic field.

Specifications
Item Qulee HGM
Model no.

HGM-202
Mass Filter Type Quadrupole
Mass Range

1-200 amu
Resolution M/ΔM=1M(10% P.H.)
Sensitivity 2.5 x 10-6A/Pa 4A/Pa
Minimum Detectable Partial Pressure 10-9Pa Level 10-13Pa Level
Detector Type Faraday Cup EM Tube/Faraday Cup
Maximum Operating Pressure 1x10-2Pa
Toatal Puresure Function capable
One Click function capable/He/H2O/N2/O2/Any Gas
One Click Leak Test function capable
Power Input DC24V
Maximum Sensor Operating Temperature 250ºC
Maximum Bakeout Temperature
(electronics removed)		 300ºC
Operating Temperature 10 - 40ºC
Standard Software Qulee QCS (Windows 2000/XP/Vista)
CE MARKING Compliance
   

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