DC Power generator DPG-10/DPG-20


The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.


  • Light-weight/space-saving
    Light-weight and space-saving design with excellent installation
  • Selectable output voltage range
    We feature a lineup with 800V specification in addition to 1000V
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.
  • Requires no cooling water
    Forced air cooling, requires no cooling water.
  • Can be equipped with a high-speed arc shutoff circuit
    Achieves low arc energy as standard. Can also be equipped with a
    high-speed arc shutoff circuit as an option.
  • Can be equipped with a flexible parallel operation function
    DPG-10, DPG-20: With the optional parallel operation function, 10kW
    and 20kW can be combined to allow up to 12units to work together in
    parallel operation. (240kW max)

Special Features / Further Applications

  • Flat panel display sputtering
  • Semiconductor sputtering
  • Touch panel sputtering
  • Industrial coating sputtering

Select document

Any questions?
Contact us