DC Power Generator DPG-30 R

The DPG-30R is 30kW DC power generator for sputtering application and designed with reliable parts and circuit. And a low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. This power generator can be used as a 30kW to 240kW power generator system by connecting with the dedicated controller.

Features

  • Increased Reliability
    Designed with reliable parts and circuit.
  • Equipped with Low Arc Energy Circuit
    A low arc energy circuit, which interrupts output immediately
    when arc is generated, is equipped as standard specification.
  • Wide Range Power Output Control
    Possible to output up to 120kW and control up to 4 units of
    power generator (DPG-30R) at same time by a single controller
    (DPGMC120R).
    Possible to output up to 240kW and control up to 8 units of
    power generator (DPG-30R) at same time by a single controller
    (DPGMC240R).
  • No Cooling Water is Required
    Air-cooled.
  • Wide Range Input Power
    AC380 to 480V ±10%.
  • Operation Without Controller
    Possible to operate without the controller by using external
    control terminal in the case of 30kW or lower.

Special Features / Further Applications

  • Flat panel display sputtering
  • Semiconductor sputtering
  • Industrial coating sputtering

Select document

Any questions?
Contact us