ECO Shock Series ES10
Power Saving Accessory for Dry Pumps ECO Shock Series ES10
- ECO-SHOCK Contributes to Energy Savings
Max.80% reduction of power consumption of dry pump. *1
Effective in suppressing heat generation of dry pump
resulting in reduction of air conditionaing costs.
ECO-SHOCK runs with only 65 Watts of power and without
N2 and cooling water.
*Unusable when pumping flammable and toxic corrosives gases.
- Effective When Used with a Capacity Transfer Type of
Excellent results when used with a multi-stage root type. *2
Very effective when dry pump runs lower than 1000Pa.
- Overall Dry Pump Performance is Improved
Improves ultimate pressure performance.
Reduction in exhaust gas noise.
No reduction in pumping speed in all pressure range.
Easy installation by attaching a valve unit to the exhaust
*1 A power consumption reduction rate changes with depending on pump model
and gas volume, etc.
*2 ECO-SHOCK could not be used with certain claw root, screw type or shaft
seal pumps, etc. Contact ULVAC for details.
*3 Modification could be required prior to installation of the ECO-SHOCK.
Contact your nearest ULVAC service center for installation.
Special Features / Further Applications
- Power saving of dry pumps used as fore pumps of turbo
molecular pump on sputtering and evaporation system.
- Power saving of dry pumps for load lock chambers.
- Power saving of dry pumps for vacuum laminator and
vacuum packing, etc.