Basis Process Gas Monitor - Qulee BGM Series

"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity. Most appropriate for system control of vacuum evaporator and various types of vacuum furnaces.


  • Excellent in Cost Performance
    Suitable for RGA application
  • Integrated Display
    No need for PC
  • Simple Operation
    "One Click" function
  • Bake Out
    Max 120˚C (248˚F) high temperature bake (250˚C (482˚F) when
    sensors are removed).
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance
    help function
    Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8)
  • QIP (Quick Install Package system) is Included
    Auto measuring package (refer to the options catalog for details)
  • Applicable Standard
    Conforms with CE

Special Features / Further Applications

  • Residual gas moni toring for PV, FPD, and semiconductor
    manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development

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