Compact Process Gas Monitor - Qulee CGM Series

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity. The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).


  • Ideal for Sputtering System
  • Ideal for process monitoring of various sputtering sysytem
  • Differential Pumping System not Required
    No differential pumping system required (at 1Pa (7.5×10-3 Torr,
    1×10-2 mbar) or lower)
  • Integrated Display
    No need for PC
  • Simple Operation
    "One Click" function
  • Bake Out
    Max 120˚C (248˚F) high temperature bake (250˚C (482˚F) when
    sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance
    help function
    Traceability of analysis tube (patent pending)
  • Various Leak Tests are available
    Helium leak test, air leak test, built-up test
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8)
  • QIP (Quick Install Package system) is Included
    Auto measuring package (refer to options catalog for details)
  • Applicable Standard
    Conforms with CE

Special Features / Further Applications

  • Process monitoring for PV, FPD, and semiconductor system
  • Residual gas analysis in PVD system
  • Impurities (H2O, etc.) control in PVD system
  • For leak testing

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