Mini Lamp Annealer MILA 5050

Infrared Gold Image Furnace / RTA System


This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.MILA-5000 series, the current models which are available for up to 20mm square size samples, have been velued by many customers since their release. But in response to increased number of demands from customers that they want to heat bigger samples, this new system, available for heat treatment of up to 50mm square size samples has been developed with still having a compact body in which heating furnace, chamber and temperature controller are all integrated.

Special Features / Further Applications


  • Rapid thermal annealing of Si wafer and compound wafer
  • Rapid thermal annealing of electronics material like substrates of optical CVD
  • Heat treatment of glass substrates, ceramics and compound materials etc
  • Thermal cycle test
  • Thermal annealing of metal materials
  • Heat resistance evaluation of coating films
  • Heating and drying of organic materials and resins


  • Heat treatment up to the maximum 50 mm square size samples
  • Maximum operating temperature 1200°C
  • Desktop type in which heating furnace, chamber and temperature controller are all integrate
  • Rapid heating/cooling and clean heaing with cold wall structures
  • Simple input of temperature recipe into computer connected with USB
  • Display temperature data on the PC monitor during heating (The data can be saved in the text format.)

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