Cold Cathode Gauge Sensor Unit G-Tran Series SC1

G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge. Since no ilament is used, extended life between gauge replacements is assured. Maintenance is expected. Ease of maintenance reduces the cost of ownership.

Features

  • Transducer specification
    When the pressure display is not required, the following advantages
    can be achieved:
    Vacuum gauge cost is reduced because the display has been eliminated
    Smaller size frees-up control panel space
    Wiring is reduced
  • Maintenance
    Maintenance is greatly simplyied
  • Filament is eliminated
    No damage from exposure to atmospheric pressure
  • Control output signal
    2 setpoint output
  • Output signal
    Pressure reading is a 0 to 10V Log output (non-linear output)
  • Power supply voltage
    Operated by DC24V

Special Features / Further Applications

  • Process control in the pressure range of precision vacuum equipment
    used for semiconductor, optics and electronic parts manufacturing
  • Process control in low vacuum range for industrial equipment such as
    furnaces
  • Process control in the pressure range for vacuum systems with
    multiple process chambers, such as in-line sputtering and single
    wafer processing equipment

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