Extreme High Vacuum Gauge AxTRAN

AxTRAN is a hot cathode type ionization vacuum gauge with a Bessel Box type energy filter installed between the ion source and the ion collector. This design provides a measurement resolution of 5×10-11Pa (3.75×10-13Torr, 5×10-13mbar) by reducing the residual current due to soft X-rays and electron stimulated desorption (ESD) ions.


  • Measures Ultra High Vacuum to Extreme High Vacuum
    Measures pressure of 5×10-11Pa (3.75×10-13Torr, 5×10-13mbar)
  • Bessel Box Type Energy Filter
    Reduce soft x-ray and residual current such as ESD ion
  • Measures a Wide Pressure Range
    Measure a wide pressure range from 1×10-2 to 5×10-11Pa
    (7.5×10-5 to 3.75×10-13 torr, 1×10-4 to 5×10-13 mbar)
  • Measured Value Output Signal
    Pressure is 0 to 10V Log output (psudo-log output) / 1V
    linear output within each digit
  • Control Output Signal
    2 set points output
  • Digital Output and Serial Communication
    BCD/RS232C (option)

Special Features / Further Applications

  • For total pressure measurement of vacuum equipment such
    as a high-energy accelerators.
  • For pressure measurement of ultra high or extreme high
    vacuum equipment used in UHV or XHV research work.

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