ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
-
Screw Type Dry Vacuum Pump LS Series
- High pumping speed
- Low power consumption
- Low noise
-
Scroll Type Dry Vacuum Pumps DIS Series
-
Scroll Type Dry Vacuum Pumps DISL Series
-
Diaphragm Type Dry Vacuum Pump DTC Series
-
Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
-
Diaphragm Type Dry Vacuum Pump DA Series
-
Diaphragm Type Dry Vacuum Pump DAP Series
-
Dry Vacuum Pump CR Series
-
Dry Vacuum Pump LR/HR/UR Series
-
Dry Vacuum Pump CR Series Version B
-
Dry Vacuum Pump GR Series
-
Rocking Piston Type Dry Vacuum Pumps DOP Series
-
ECO Shock Series ES10
-
ECO Shock Series ES4A