ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
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Scroll Type Dry Vacuum Pumps DIS Series
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Scroll Type Dry Vacuum Pumps DISL Series
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Diaphragm Type Dry Vacuum Pump DTC Series
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Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
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Diaphragm Type Dry Vacuum Pump DA Series
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Diaphragm Type Dry Vacuum Pump DAP Series
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Dry Vacuum Pump CR Series
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Dry Vacuum Pump LR/HR/UR Series
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Dry Vacuum Pump CR Series Version B
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Dry Vacuum Pump GR Series
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Rocking Piston Type Dry Vacuum Pumps DOP Series
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ECO Shock Series ES10
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ECO Shock Series ES4A