ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
-
Screw Type Dry Vacuum Pump LS Series
- High pumping speed
- Low power consumption
- Low noise
-
Scroll Type Dry Vacuum Pumps DIS Series
- 1 orbiting and 2 fixed scrolls
- Atmospheric pressure is possible
- Low vibration and low noise
-
Scroll Type Dry Vacuum Pumps DISL Series
- 1 orbiting and 1 fixed scroll
- Suitable for industrial use
-
Diaphragm Type Dry Vacuum Pump DTC Series
- Made of PTFE and FPM
- Vacuum down to 1000Pa
- Suitable for corrosive gas or organic solvent
-
Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
