Scroll Type Dry Vacuum Pumps DIS Series

Scroll Type Dry Vacuum Pumps DIS Series

Features

  • Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls
  • Operation from atmospheric pressure is possible
  • High ultimate pressure level is attainable
  • Low vibration and low noise
  • Maintenance cycle can be controlled by hour meter.

Special Features / Further Applications

  • Analytical equipment
  • Gas recovery system
  • Coating equipment
  • Back pump for TMP
  • Helium leak detector
  • Manufacturing process for semiconductor.

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