Scroll Type Dry Vacuum Pumps DIS Series
Scroll Type Dry Vacuum Pumps DIS Series
Features
- Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls
- Operation from atmospheric pressure is possible
- High ultimate pressure level is attainable
- Low vibration and low noise
- Maintenance cycle can be controlled by hour meter.
Special Features / Further Applications
- Analytical equipment
- Gas recovery system
- Coating equipment
- Back pump for TMP
- Helium leak detector
- Manufacturing process for semiconductor.