Oil Diffusion Vacuum Pump ULK Series
ULVAC's diffusion pumps ULK Series have been developed not only for superior performance, but also for extremely low operating cost.
- Designed for large critical back-pressure
- Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
- Use hose flanges (except for vent flanges on ULK-04A and 06A)
- Pumps can be cleaned easily (parts can be disassembled easily).
- Come with mechanism to stop flow of operating fluid to auxiliary pump.