Oil Diffusion Vacuum Pump ULK Series

ULVAC's diffusion pumps ULK Series have been developed not only for superior performance, but also for extremely low operating cost.



  • Designed for large critical back-pressure
  • Extremely stable performance at pressures down to 10-2 Pa (10-4 torr)
  • Use hose flanges (except for vent flanges on ULK-04A and 06A)
  • Pumps can be cleaned easily (parts can be disassembled easily).
  • Come with mechanism to stop flow of operating fluid to auxiliary pump.
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