Turbo Molecular Pump UTM Series

The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side). Mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing. Moreover, a low vibration and a high compression ratio are realized.

Features

  • Magnetic bearing was adopted as the upper part, pivot
    bearing was adopted as the lower part, and mechanical
    contact at the time of a high velocity revolution is eliminated.
    Thereby, bearing exchange and an oil change become
    unnecessary and realize extended life-span of bearing.
  • Fine dynamic balance rotor and highly efficient bearing by
    design of original blades realize a high velocity revolution,
    and inlet performance (high compression ratio) of low
    molecular weight gas, such as H2 and He.
  • A pivot bearing and fluoride oil (oil whose saturated vapor
    pressure is chemically stable and is low) are adopted, and
    environment without the infinite oil near zero is realized.
    Achievement of clean, ultrahigh vacuum is possible.
  • Adoption of a fine dynamic balance rotor and a highly
    efficient bearing realizes low noise and low vibration.

Special Features / Further Applications

  • Main pumping systems for analysis equipment, researchand-
    development equipment, and an experimental device.
  • Main pumping system for low molecule gas, evacuation
    such as H2 and He.
  • Main pumping systems for analysis equipment and
    evaluation equipment, which are vibration sensitive

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