Features

• Highly reliable
  Designed to exhibit maximum exhaust rate of the vacuum
  pump having large conductance upon disk opening and
  less leak rate.
• Various lineups
  ncludes l (angle) type valve, gate type valve, variable leak
  type valve.
  Applicable in all vacuum conditions from atmospheric
  pressure to ultra high vacuum.
  Main body material types are SS (soft steel), stainless
  steel, aluminum.
  Valves connection flange are vacuum flange, quick coupling
  flange, CF (UFC) flange and so on.
  Disk seal materials are nitrile rubber, fluorine rubber, metal
  and polymide resin.
  With theselineups, various proposals arae possible that
  matches with the customer needs.
• Two operating types
  Manually driven and compressed air driven.
• Reverse pressure specification
  100A or less are compatible as standard. (Revere pressure
  differential: within 0.1MPa)
  compatibility 150A or more are compatible as option
• Baking out, customizing, and so on
• vacuum exhaust line for sputter apparatus and evaporation
  apparatus
• vacuum exhaust line for various heat processing furnace
• vacuum exhaust line for vacuum drying equipment and
  freeze-drying equipment
• vacuum exhaust line for leak tester
• vacuum exhaust line for various other vacuum equipment
  VUGP
  VUGH
  VULH VLP
  VTP
  VLH
  VUH VUH-MVF 10-AIV VULP
  Features Applications