LED devices provide high intensity light and low power consumption, and are widely used in the fields of next-generation displays and lighting systems. ULVAC’s production technology contributes to the production of LED devices.
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Dry Etching Tool APIOS NE-950EX
- 2 to 6inch wafers
- Higher Through-Put
- High maintainability, stability and reliability
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Batch-type High Vacuum Evaporation System ei-Series
- Applicable for 2-6inch wafers
- Superior PC-operating system
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Load-Lock-type High Vacuum Evaporation System CV-Series
- 4 - 8 inch wafers
- Supports substrate holder transfer
- Supports lift-off deposition