Magnetic Multi-Layer System Magest S200
MagestTMS200 provides the multi-layer deposition of ultra thin films under the ultra high vacuum condition and is applicable for the deposition of various materials by RF or DC sputtering.
Our Products and Technologies
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UHV (ultra-high vacuum) processes.
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Triple-gun cathode.
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Outstanding controllability and reproducibility with ultra-thin films of 10 nm or less
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Excellent control of magnetic anisotropy and coercive force
Special Features / Further Applications
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MRAM and Magnetic Device
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Materials development