Cluster-type Sputtering System SME-200
The SME Series (SME-200) is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors.The SME-series lets you create a highly cost-effective line tailored to your application.
Our Products and Technologies
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For manufacturing of gate electrodes, capacitors, resistors and a wide range of components
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Highly-reproducible, high-quality deposition
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Choice of system configurations
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Easy maintenance reduces down time
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Outstanding film stress control and particle reduction
Special Features / Further Applications
- space-saving and highly cost-effective customized solutions
Further Applications
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MEMS devices
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SAW Devices
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Compound Semiconductors