ULVAC offers technical solutions for the production of Si power devices. ULVAC is the industry leader in the delivery of Si power devices, including IGBTs.
-
Activation Annealing System Ailesic-2000
-
Oxidation-Nitridization-Annealing System Ailesic 1400-1700
-
High-temp Ion Implanter for SiC IH-860DSIC
-
Medium Current Ion Implanter SOPHI-200/260
-
Dry Etching System for Production NE-5700 & NE-7800
-
Load-lock-type Plasma CVD System CC-200/400
-
Back Side Metallization Sputtering System SRH-530