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  • Components
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  • Products
  • Equipment
  • By technology
  • Sputtering

ULVAC’s sputtering systems have the best track record in the industry.

  • Magnetic Multi-Layer System Magest S200

  • Load-lock-type Sputtering System SDH-4550L

  • Load-lock-type Sputtering System CS-200

  • Back Side Metallization Sputtering System SRH-530

  • Cluster-type Sputtering System SME-200
  • Components
    • Vacuum Pumps
      • Dry Pumps
        • Scroll Type Dry Vacuum Pumps DIS Series
        • Scroll Type Dry Vacuum Pumps DISL Series
        • Diaphragm Type Dry Vacuum Pump DTC Series
        • Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
        • Diaphragm Type Dry Vacuum Pump DA Series
        • Diaphragm Type Dry Vacuum Pump DAP Series
        • Dry Vacuum Pump CR Series
        • Dry Vacuum Pump LR/HR/UR Series
        • Dry Vacuum Pump CR Series Version B
        • Dry Vacuum Pump GR Series
        • Rocking Piston Type Dry Vacuum Pumps DOP Series
        • ECO Shock Series ES10
        • ECO Shock Series ES4A
      • Oil Rotary Pumps
        • Oil Sealed Rotary Vacuum Pump GHD-031
        • Oil Sealed Rotary Vacuum Pump GLD Series
        • Oil Rotary Vacuum Pump VD-Series
        • Oil Rotary Vacuum Pump VD-Series 901
        • Oil Rotary Vacuum Pump VS1501, VS2401
        • Oil Rotary Vacuum Pump PKS Series
        • Oil-sealed Rotary Vacuum Pump PVD Series
        • Oil Rotary Vacuum Pump VS650A
      • Mechanical Booster Pumps
        • Mechanical Booster Pump PRC Series
        • Mechanical Booster Pump PMB Series D
      • Ion Pumps
        • Acter Pump PST-400CXII/PST-400AXII
        • Acter Pump PST-200CXII/PST-200AXII
        • Acter Pump PST-100CX/PST-100AX
        • Acter Pump PST-050CU/PST-050AU
        • Acter Pump PST-030CU/PST-030AU
        • Acter Pump PST Series
      • Turbo Molecular Pumps
        • Turbo Molecular Pumping System Desktop YTP
        • Turbo Molecular Pump UTM-FH, FW Series
        • Turbo Molecular Pump UTM Series
      • Oil Diffusion Pumps
        • Oil Diffusion Ejector Vacuum Pump PBL Series
        • Oil Diffusion Vacuum Pump PFL Series
        • Oil Diffusion Vacuum Pump ULK Series
      • Cryo Pumps
      • Titanium Getter Pumps
        • Titanium Getter Pump GGT-3, PGT Series
      • Accessories
        • Oil SMR-100
        • Oil Mist Trap OMT Series
        • Oil for Vacuum Pumps ULVOIL R Series/Super R Series
        • Oil Mist Trap TM/TMX Series
    • Vacuum Gauges
      • G-TRAN Series Pressure Switch Unit (SAU)
      • Ceramic Capacitance Manometer, CCMT-D Series
      • Extreme High Vacuum Gauge AxTRAN
      • G-TRAN Series Pirani Gauge Sensor Unit SP1
      • Atmospheric Pirani Gauge Combo SW1 & ISG1
      • G-TRAN Series 4CH Display Unit IM1R1, IM2R1
      • Cold Cathode Gauge Sensor Unit G-Tran Series SC1
      • Multi Ionization Gauge G-TRAN Series ST2-1, ST2-2
    • Process Gas Monitor
      • Qulee Series Option
      • Compact Process Gas Monitor - Qulee CGM Series
      • Basis Process Gas Monitor - Qulee BGM Series
      • Reactive Process Gas Monitoring System - Qulee RGM Series
      • High Performance Process Gas Monitor - Qulee HGM Series
    • Leak Detectors
      • HELIOT 700 Series
      • HELIOT 900 Series
    • Thin Film Measurement / Deposition Controller
      • Spectroscopic Elllipsometer
        • High-speed Spectroscopic Ellipsometer UNECS Series
      • Film Thickness Measurement
      • Deposition Controller
    • Optical Process Monitor
    • Vacuum Valves
      • Vacuum Valve Series
    • Parts for Ultra-High Vacuum
    • Power Generator
      • DC Power generator DPG-10/DPG-20
      • DC Power Generator DPG-30 R
      • Pulsed DC Power generators DPG-5P/DPG-10P
    • Precise Microplate Paddle Mixer
      • Precise Microplate Paddle Mixer
    • Molecular Interaction Analyzer
      • Affinix Q8
    • Thermal Analysis
      • Mini-PEM
      • ZEM-3
      • Infrared Gold Image Furnace RHL-E series
      • Mini Lamp Annealer MILA 5050
      • Mini Lamp Annealer MILA 5000
      • ZEM-5
  • Equipment
    • By technology
      • Sputtering
        • Magnetic Multi-Layer System Magest S200
        • Load-lock-type Sputtering System SDH-4550L
        • Load-lock-type Sputtering System CS-200
        • Back Side Metallization Sputtering System SRH-530
        • Cluster-type Sputtering System SME-200
      • PE-CVD
        • Expanding Thermal Plasma CVD System ULGLAZE Series
        • Cluster-type PE-CVD System CME-Series
        • Load-lock-type Plasma CVD System CC-200/400
      • Vacuum Evaporation
        • Batch-type High Vacuum Evaporation System ei-Series
        • Load-Lock-type High Vacuum Evaporation System CV-Series
        • Organic/ Inorganic Compound Deposition System VEP-Series
        • Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA
      • Ashing
        • Resist Strip System ENVIRO™ Optima
        • Advanced Plasma Resist Strip System ENVIRO-1Xa
      • Plasma-Etching
        • A Batch System to Remove Native Oxide RISE-300
        • Dry Etching System for MEMS production NLD-5700
        • Dry Etching System for Production NE-5700 & NE-7800
        • Dry Etching Tool APIOS NE-950EX
        • High-Density Plasma Etching System NE-550
      • Ion Implantation
        • High-temp Ion Implanter for SiC IH-860DSIC
        • Medium Current Ion Implanter SOPHI-200/260
      • Annealing and Oxidation
        • Activation Annealing System Ailesic-2000
        • Oxidation-Nitridization-Annealing System Ailesic 1400-1700
      • Heat Treatment
        • Vertical-type Vacuum Heat Treatment Furnace FHV-Series
        • Vacuum Induction Melting Furnace FMI-Series
        • Roller-type Vacuum Heat Treatment Furnace FHHn-Series
        • Batch-type Vacuum Heat Treatment Furnace FHB-60C
        • Vacuum brazing furnace FB- & FBC-Series
      • Roll Coaters
        • Evaporation Roll Coater EW-Series
      • Freeze Drying / Vacuum Drying
        • Compact Freeze Drying System DFR-Series
        • Compact Freeze Drying System DFM-Series
        • Lyophilized - Freeze Drying System DFB-Series
      • Vacuum Distillation
        • Distillation - Centrifugal Evaporation System CEH-Series
      • Analytical Equipment
      • Other
    • By application
      • Advanced Packaging Device
        • Resist Strip System ENVIRO™ Optima
      • Architectural Glass
      • Automobile Parts
        • Roller-type Vacuum Heat Treatment Furnace FHHn-Series
        • Vacuum brazing furnace FB- & FBC-Series
        • Expanding Thermal Plasma CVD System ULGLAZE Series
      • Automotive
        • Batch-type Vacuum Heat Treatment Furnace FHB-60C
      • Aviation - Airplane Parts
        • Vertical-type Vacuum Heat Treatment Furnace FHV-Series
      • Decorative Coating
        • Evaporation Roll Coater EW-Series
      • Electronic Materials
      • EMI Shielding
        • Load-lock-type Sputtering System SDH-4550L
      • Food & Medicine
      • Food Processing
      • Health Care
      • Functional Materials
      • Display
      • LED Device
        • Dry Etching Tool APIOS NE-950EX
        • Batch-type High Vacuum Evaporation System ei-Series
        • Load-Lock-type High Vacuum Evaporation System CV-Series
      • Magnetic Device
        • Magnetic Multi-Layer System Magest S200
      • Magnet Materials
        • Vacuum Induction Melting Furnace FMI-Series
      • MEMS Device
        • High-Density Plasma Etching System NE-550
        • Cluster-type Sputtering System SME-200
      • OLED
        • Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA
        • Cluster-type PE-CVD System CME-Series
      • Optical Film
        • Dry Etching System for MEMS production NLD-5700
        • Load-lock-type Sputtering System CS-200
      • Pharmaceutical
        • Distillation - Centrifugal Evaporation System CEH-Series
        • Compact Freeze Drying System DFR-Series
        • Compact Freeze Drying System DFM-Series
        • Lyophilized - Freeze Drying System DFB-Series
      • Photovoltaic
      • Power Device
        • Activation Annealing System Ailesic-2000
        • Oxidation-Nitridization-Annealing System Ailesic 1400-1700
        • High-temp Ion Implanter for SiC IH-860DSIC
        • Medium Current Ion Implanter SOPHI-200/260
        • Dry Etching System for Production NE-5700 & NE-7800
        • Load-lock-type Plasma CVD System CC-200/400
        • Back Side Metallization Sputtering System SRH-530
      • R&D Equipment for Displays
      • Semiconductor Process (FEOL/BEOL)
        • A Batch System to Remove Native Oxide RISE-300
        • Advanced Plasma Resist Strip System ENVIRO-1Xa
      • Semiconductor Process (Non Volatile Memory)
      • Thin Film Deposition
      • Thin Film Battery
        • Organic/ Inorganic Compound Deposition System VEP-Series
      • Touch Panel
  • Materials
    • Sputtering Targets
      • Sputtering Targets for Photovoltaic Applications
      • Sputtering Targets for Semiconductor Applications
      • Sputtering Targets for Flat Panel Display Applications
    • High Performance Materials
      • Wire/Bar [Ta] [Nb]
      • Sheet [Ta] [Nb]
      • Reactor Vessels [Ta] [Nb] [Zr]
    • Nano-metal Ink
      • Nano-metal Ink "Ag, L-Ag, Au, ITO series"
Parkring 11
85748 Garching
Germany

+49-89-96 0909 0
+49-89-96 0909 96

ulvac@ulvac.de
www.ulvac.eu

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