Cluster-type Sputtering System SME-200

The SME Series (SME-200) is a series of space-saving, low-cost cluster-type sputtering systems ideal for SAW devices and compound semiconductors.The SME-series lets you create a highly cost-effective line tailored to your application.



  • For manufacturing of gate electrodes, capacitors, resistors and a wide range of components

  • Highly-reproducible, high-quality deposition

  • Choice of system configurations

  • Easy maintenance reduces down time

  • Outstanding film stress control and particle reduction


Special Features / Further Applications

  • space-saving and highly cost-effective customized solutions



Further Applications


  • MEMS devices

  • SAW Devices

  • Compound Semiconductors


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