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Batch-type High Vacuum Evaporation System ei-Series
- Applicable for 2-6inch wafers
- Superior PC-operating system
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Load-Lock-type High Vacuum Evaporation System CV-Series
- 4 - 8 inch wafers
- Supports substrate holder transfer
- Supports lift-off deposition
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Organic/ Inorganic Compound Deposition System VEP-Series
- System modules can be combined
- Easy to upgrade
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Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA
- research system for materials development
- cluster system for low-volume production
- in-line system for mass-production