Products

Batch-type High Vacuum Evaporation System ei-Series

1. Applicable for 2-6inch wafers
2. Superior PC-operating system

Load-Lock-type High Vacuum Evaporation System CV-Series

1. 4 - 8 inch wafers
2. Supports substrate holder transfer
3. Supports lift-off deposition

Organic/ Inorganic Compound Deposition System VEP-Series

1. System modules can be combined
2. Easy to upgrade

Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA

1. research system for materials development
2. cluster system for low-volume production
3. in-line system for mass-production